SEMI release eight new technical standards
2020-12-03
ALLTOP
100
SEMI released eight used in semiconductor, MEMS, FPD and photovoltaic manufacturing industry of new technical standards. These new standards by participating in SEMI international standard project of equipment material vendors, device manufacturers technical experts and development, these new standards is
SEMI T20. 3,半导体及相关产品鉴定的服务通讯规范
SEMI E158,用于传送和储存450mm晶圆的晶圆传送设备的机械规范
SEMI M76,450mm抛光单晶硅晶圆开发规范
SEMI D60,FPD极化薄膜及材料表面抗刮伤特性的测试方法
SEMI E156,450mm晶圆储存传送界面的机械规范
SEMI E157,模组工艺跟踪的规范
SEMI D59,3D显示术语
SEMI PV4,用于薄膜光伏的第五代衬底尺寸范围的规范
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